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Digital 300 Series Mass Flow Meters and Mass Flow Controllers (Medium Flow)

The Digital 300 Series of thermal mass flow meters and controllers from Teledyne are designed to accurately measure mass flow without corrections or compensations for gas pressure and temperature. They are accurate to better than ± (0.5% of reading + 0.2% of full scale) for full scale flow rates from 0-5 sccm to 0-10,000 slm.

Technical Brochure

Description

FEATURES

  • 301/303 Range 0 – 25 slm to 0-1000 slm
  • 305/307 Range 0-1000 slm to 0-2500 slm (N2 Equivalent)
  • Excellent Accuracy: ±(0.5% of Reading + 0.2% of Full Scale)
  • Touchscreen Display/Control Option
  • 0-5 VDC, 0-10 VDC, 0-20 mA or 4-20 mA I/O
  • RS232 / RS485
  • Typical Settling Time:
  • HFM-D-301/305 < 1 second
  • HFC-D-303/307 1 –2 seconds
  • Self-diagnostic Status LEDs
  • Auto-Zero (Controllers Only)
  • Totalizer
  • Large Diameter Sensor Tube (low dP)
  • Low Wetted Surface Area
  • Operating Pressures to 500 psi or higher
  • NIST Traceable Calibration

APPLICATIONS

  • Leak Testing
  • High Purity Gas Delivery
  • Heat Treat
  • Gas Blending
  • Secondary Calibration Reference
  • Fuel Cell R&D
  • Environmental Monitoring

BENEFITS

  • High Accuracy
  • Fast Metering Response
  • Superior Linearity
  • Rapid Controller Settling Time
  • Digital Extended Range
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