Mass Flow Meters and Controllers (General Purpose)

The HFM-200/HFC-202 is Teledyne Hastings’ flexible, general-purpose series of mass flow meters and controllers. Featuring reliability and stability, the 200 Series is chosen by OEM’s for its very stable performance with varying ambient conditions. A wide choice of elastomer seals makes this flow controller compatible with most gases.

The HFM-200 / HFC-202 meters and controllers have flow ranges from 0-10 sccm to flows of 0-25 slm; provide analog outputs, are constructed of stainless steel and have normally closed valves. The full-scale range is specified by the end-user. A NIST traceable calibration certificate is standard. Many corrosive gases and pressures up to 1000 PSIG are easily measured. Cleaning for oxygen service is available.

Technical Brochure




  • ±1% of Full-Scale Accuracy1
  • Input Power +/- 15 VDC or +24 VDC  (specify when ordering)
  • Available Flow Ranges: 0 – 10 sccm up to 0 – 25 slm (N2 Equivalent)
  • NIST Traceable Calibration


  • Gas Blending
  • Environmental Monitoring
  • Thin Film Deposition
  • Leak Testing
  • Medical Research
  • Chromatography
  • R&D


  • Excellent Stability
  • Proven Reliability
  • Outstanding Zero Stability


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