FEATURES
- Range 0 – 5 sccm to 0-25 slm (N2 Equivalent)
- Excellent Accuracy: ±(0.5% of Reading + 0.2% of Full Scale)
- All-Metal Seals
- HFC-D-302 Valve Features Kalrez® Seat
- Touchscreen Display/Control Option
- 0-5 VDC, 0-10 VDC, 0-20 mA or 4-20 mA I/O
- RS232 / RS485
- Typical Settling Time:
- HFM-D-300 < 1 second
- HFC-D-302 1 –2 seconds
- Status LEDs
- Auto-Zero (HFC-D-302 Controller Only)
- Totalizer
- Large Diameter Sensor Tube (low dP)
- Low Wetted Surface Area
- Operating Pressures to 500 psi or higher
- NIST Traceable Calibration
APPLICATIONS
- Leak Testing
- High Purity Gas Delivery
- Thin Film Deposition
- Gas Blending
- Pharmaceutical
- Fuel Cell R&D
- Environmental Monitoring
- Medical Research
BENEFITS
- High Accuracy
- Fast Metering Response
- Superior Linearity
- Rapid Controller Settling Time
- Digital Extended Range
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