Digital 300 Series Mass Flow Meters and Mass Flow Controllers (Low Flow)

The Digital 300 Series of thermal mass flow meters and controllers from Teledyne are designed to accurately measure mass flow without corrections or compensations for gas pressure and temperature. They are accurate to better than ± (0.5% of reading + 0.2% of full scale) for full-scale flow rates from 0-5 sccm to 0-25 slm.


Technical Brochure

Description

FEATURES

  • Range 0 – 5 sccm to 0-25 slm (N2 Equivalent)
  • Excellent Accuracy: ±(0.5% of Reading + 0.2% of Full Scale)
  • All-Metal Seals
  • HFC-D-302 Valve Features Kalrez® Seat
  • Touchscreen Display/Control Option
  • 0-5 VDC, 0-10 VDC, 0-20 mA or 4-20 mA I/O
  • RS232 / RS485
  • Typical Settling Time:
  • HFM-D-300 < 1 second
  • HFC-D-302 1 –2 seconds
  • Status LEDs
  • Auto-Zero (HFC-D-302 Controller Only)
  • Totalizer
  • Large Diameter Sensor Tube (low dP)
  • Low Wetted Surface Area
  • Operating Pressures to 500 psi or higher
  • NIST Traceable Calibration

APPLICATIONS

  • Leak Testing
  • High Purity Gas Delivery
  • Thin Film Deposition
  • Gas Blending
  • Pharmaceutical
  • Fuel Cell R&D
  • Environmental Monitoring
  • Medical Research

BENEFITS

  • High Accuracy
  • Fast Metering Response
  • Superior Linearity
  • Rapid Controller Settling Time
  • Digital Extended Range

Reviews

There are no reviews yet.

Be the first to review “Digital 300 Series Mass Flow Meters and Mass Flow Controllers (Low Flow)”

Your email address will not be published. Required fields are marked *